DEVELOPMENT OF A NEW STRUCTURE OF 3-DOF PIEZORESISTIVE ACCELEROMETER TO ENHANCE THE SENSITIVITY

Abstract

Nowadays, the Micro Electro Mechanical System (MEMS) technology has been achieved great developments. Accelerometer is one kind of the most popular MEMS sensors due to it’s widely applications. In order to fabricate any MEMS device, the design and simulation have been considered seriously. This paper presents a new design of the three degrees of freedom piezoresistive accelerometer to improve the sensitivity, urgent demand from the reality. The ANSYS software was utilized to design, simulate and evaluate the advantages of this new structure compared to other sensors fabricated previously.