Synthesis of CrN hard coatings by sputter Ion plating

Abstract

CrN film is used as a protective coating on material surfaces for its special properties such as high hardness, high thermal stability, high corrosion and wear resistance. CrN thin films were deposited by sputter ion plating on stainless steel substrates at deposition pressure of 9.10-3torr. Thin films have good crystal structure, with preferred orientation on (111) planes parallel to sample surface. Crystal structure and adherence of CrN coatings depend on the nitrogen content in the sputtering gas and substrate bias. Thin films have high corrosion resistant in imitative mediums (acetate medium, sweaty medium).