A CASE STUDY OF MACROPARTICAL REDUCING WHILE COATING TIALCN BY ARC CATHODE USING PERMANENT MAGNET

Abstract

This study aimed to investigate the effect of using a permanent magnet to increase the ratio of plasma and particles in arc source deposition. A permanent magnet was installed after surface the arc source to create a magnetic field that would control the plasma arc and reduce the formation of macro particles. The size and strength of the magnet were carefully chosen to ensure that the magnetic field was strong enough to generate the desired effect on the plasma arc. The results showed that the use of a permanent magnet significantly increased the ratio of plasma and particles in arc source deposition. The magnetic field created by the permanent magnet effectively controlled the plasma arc and reduced the formation of macro particles, resulting in a higher percentage of plasma in the deposition process. This improvement in the plasma-to-particle ratio led to higher-quality thin films, with fewer defects and higher uniformity. The study also found that the magnetic field strength and distance position of the permanent magnet could be adjusted to optimize the plasma-to-particle ratio for specific deposition applications with a distance from the permanent magnet to the target surface is 0 -15mm. The validity of this was confirmed by maintaining the coating parameters constant and depositing TiAlCN on SKD11 steel. The effectiveness of the reduction of microparticles was examined by microscopy. The only variables that were altered were the distance between the permanent magnet and the back of the target, as well as the shape of the target surface after a duration of 2 hours.