The conceptual design and performance simulation of Micro-linear actuators

Abstract

Micro linear actuators are applied to many precision fields such as ultra-precise positioning, precision manufacturing, optics, etc. The conceptual design of a micro-linear actuator is presented in this paper. The concept is based on a stacked piezo and a flexure-based differential amplifier mechanism. The paper also presents the simulation of the designed actuator using ANSYS. The simulation is performed by combining two problems: contact problem and a strain-electricity coupling