High power continuous-wave 1064 nm DPSS laser for machining semiconductor and metal materials

Abstract

A diode-pumped solid-state (DPSSL) laser system with 808 nm laser as pump source has been developed successfully. We used the optically anisotropic crystal Nd:YVO4 as the active medium. The threshold pump power and slope efficiency were measured and discussed. With lowly doped crystal Nd:YVO4 0.27% and concave-plane cavity, the laser showed good performance in the pumping range up to 11 W. Using the 1064 nm beam, micromachining were successfully conducted upon some normal materials such as plastic, wood; some semiconductors such as silicon and metals such as aluminum, copper, steel.