Simulation antireflection (ar) thin film from glancing angle deposition by genetic algorithms

Abstract

In recent years, glancing angle deposition technic (GLAD) is interested by many scientists. GLAD can fabricate many thin films which are used in variours applications. GLAD thin films with zigzag structure have the same optical characteristics with multi-layer thin films, so we can use them to fabricate optical thin films, such as AR or filters. In this report, basing on GLAD, we use Genetic algorithms to simulate AR thin film in visible region with TiO₂ and MgF₂ materials. The results from our simulating program can create a lot of advantages in studying optical thin films.