STUDY ON DESIGN OPTIMIZATION OF A CAPACITIVE SILIC DUST CONCENTRATION MEASUREMENT SENSOR

Abstract

This paper presents research and optimization of coplanar capacitive
sensor design to measure silic dust concentration in quartz stone powder
processing plants. To optimize the sensor structure and reduce parasitic
components and common noise, the capacitive sensor structure is designed
consisting of a reference capacitor and a sensing capacitor. The sensor's
electrode is covered with an Acrylic layer for protection and electrical
insulation. Simulations were conducted using silic dust particles with
dielectric permittivity of 5, dust particle radius from 10µm to 500µm and
varying the dust particle concentration to study the working principle of the
sensor. Simulation results show the linearity of the sensor's output
capacitance corresponding to different dust particle concentrations.
Simulation results demonstrate that this sensor has high potential for
application in measuring silic dust concentrations in quartz stone powder
processing plants and in the environment.