GROWTH OF IN2O3 NANOWIRE ON INP(100) SUBSTRATE USING Au NANOPARTICLE CATALYST VIA THE VAPOR LIQUID SOLID METHOD

Abstract

In this work, we present the synthesis of In2O3 nanowire on InP(100)
substrate, a novel indium source, using a 22nm-thick Au layer as a catalyst by the
vapor-liquid-solid approach. Vertically-standing In2O3 nanowires are grown along
(100) direction and indicate crystallinity and lengths from several tens of nm to
several hundreds of μm, at a temperature of 500o
C. Their diameters are about 30
- 70nm and their length is several tens of nanometers to a few hundred
micrometers. The morphology of the nanowire was manipulated by various Au
nanoparticle sizes, the working pressure (P), annealing time, and temperature.
Using the InP substrate paves a compatible technological advantage in the
growth of In2O3 nanowires that is more controlled In source and it allows the
growth of In2O3 nanowires at a temperature of 500°C by the VLS method