Effects of humidity and temperature on quality factor of micro-beam resonators in atmospheric pressure and gas rarefaction

  • Nguyen Chi Cuong*, Trinh Xuan Thang, Lam Minh Thinh, Vuong Dinh Duy Phuc, Truong Huu Ly, Ngo Vo Ke Thanh, Le Quoc Cuong
  • Phan Minh Truong
Từ khóa: micro-beam resonators, quality factor, relative humidity, squeeze film damping, temperature

Tóm tắt

At atmospheric pressure (p=101325 Pa), the effects of humidity and temperature on moist air become important when discussing the quality factor of micro-cantilever and micro-bridge resonators. The squeeze film damping (SFD) problem, the dominant damping source for micro-beam resonators, is modelled using the modified molecular gas lubrication (MMGL) equation with finite element modelling (FEM) in the eigenvalue problem.

Tác giả

Nguyen Chi Cuong*, Trinh Xuan Thang, Lam Minh Thinh, Vuong Dinh Duy Phuc, Truong Huu Ly, Ngo Vo Ke Thanh, Le Quoc Cuong
Research Laboratories of Saigon High-Tech Park, Lot I3, N2 Street, Saigon High-Tech Park, Tan Phu Ward, District 9, Ho Chi Minh City, Vietnam
Phan Minh Truong
Institute for Computational Science and Technology, SBI Building, Quang Trung Software City, Tan Chanh Hiep Ward, District 12, Ho Chi Minh City, Vietnam
điểm /   đánh giá
Phát hành ngày
2024-03-15
In ra
Số. 1C (2024): MARCH 2024 . VOLUME 66 NUMBER 1
Chuyên mục
PHYSICAL SCIENCES