3D measurement of surface profile using Holography technique and Fourier transform method

  • Pham Duc Tuan School of Mechanical Engineering, Hanoi University of Science and Technology
  • Vu Thanh Tung School of Mechanical Engineering, Hanoi University of Science and Technology
  • Hoang Anh Tu School of Mechanical Engineering, Hanoi University of Science and Technology
  • Phan Dinh Tuan School of Mechanical Engineering, Hanoi University of Science and Technology
  • Pham Duc Quang VNU University of Engineering and Technology
  • Tran Van Thuc School of Mechanical Engineering, Hanoi University of Science and Technology
Keywords: 3D Measurement; Holography; Fourier transform.

Abstract

Holography has an important role in the field of 3D surface measurement due to its ability to simultaneously provide intensity and phase information of the measured surface with a single image. In this article, a computational and experimental method for 3D surface reconstruction of rough samples using Holography technique is proposed. Compared with white light interferometry, the proposed method has high stability due to no micro-displacement, fast measurement speed, and surface information extracted by a single frame and axial resolution reaching nanometer level. Fourier transform combined with noise filtering techniques is used to improve the accuracy of 3D surface measurement. The rough surface Ra = 0.2943 µm is successfully constructed by the proposed method with a deviation of ± 8 nm with a coverage factor of 3 compared with the measurement on white light interferometry. This study can be applied to high-precision 3D surface measurement, optical components, and micro-electromechanical structures.

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Published
2024-10-25
Issue
Vol. 98 (2024)
Section
Physics & Materials Science