DISPLACEMENT AMPLIFICATION AND SELF-LOCKING MICROGRIPPER DRIVEN BY ELECTROTHERMAL V-SHAPED ACTUATORS
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DOI:
https://doi.org/10.34238/tnu-jst.12121Abstract
This paper presents the design and analysis of a microgripper utilizing a V-shaped electrothermal actuator with a high displacement amplification factor (kd ≈ 4.4) and an integrated self-locking mechanism, which allows the gripper to maintain its hold on objects without requiring continuous power supply, thereby significantly reducing energy consumption. The system consists of a central V-shaped actuator that drives the lever arms and gripping jaws, along with a ratchet-based self-locking system actuated by two smaller V-shaped actuators. By applying a driving voltage of U = 29.9 V, the total displacement of the gripping jaws reaches , enabling the microgripper to handle objects with a minimum diameter of 43 µm. This design ensures high precision and adaptability in manipulating various object sizes. Furthermore, the microgripper structure is optimized to enhance displacement efficiency and gripping force while maintaining a compact and easy-to-fabricate design. Future improvements may include the integration of force sensors and an automatic voltage control system to further optimize performance and energy efficiency.Downloads
References
S. Iqbal and A. Malik, “A review on MEMS based micro displacement amplification mechanisms,” Sensors and Actuators A: Physical, vol. 300, 2019, Art. no. 111666, doi: 10.1016/j.sna.2019.111666.
J. Cecil, D. Vasquez, and D. Powell, “A review of gripping and manipulation techniques for micro-assembly applications,” International Journal of Production Research, vol. 43, no. 4, pp. 819-828, 2005, doi: doi: 10.1080/00207540512331311813.
P. H. Pham, L. B. Dang, and H. N. Vu, “Micro robot system with moving micro-car driven by electrostatic comb-drive actuators,” Microsystem Technologies, vol. 16, pp. 505–510, 2010, doi: 10.1007/s00542-010-1017-9.
H. Llewellyn-Evans, C. A. Griffiths, and A. Fahmy, “Microgripper design and evaluation for automated µ-wire assembly: A survey,” Microsystem Technologies, vol. 26, pp. 1745-1768, 2020, doi: 10.1007/s00542-019-04741-4.
Y. Jia, M. Jia, and Q. Xu, “A Dual-Axis Electrostatically Driven MEMS Microgripper,” International Journal of Advanced Robotic Systems, vol.11, pp. 1-9, 2014, doi: 10.5772/59677.
A. R. Kalaiarasi and S. H. Thilagar, “Design and modeling of electrostatically actuated microgripper,” in Proceedings of 2012 IEEE/ASME 8th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, 2012, pp. 7-11, doi: 10.1109/MESA.2012.6275528.
C. Hao, X. Kong, S. X. Dong, C. M. Xu, and Y. Haiyang, “The Radial Point Interpolation Method (RPIM) for analyzing a V-shaped Electrothermal Actuator,” Journal of Micromechanics and Microengineering, vol. 35, no. 2, pp.1-9, 2025, doi: 10.1088/1361-6439/ada9fb.
H. P. Pham, V. D. Bui, and M. C. Pham, “Study and Design of Micro Gripper Driven by Electrothermal V-Shaped Actuator,” JST: Smart Systems and Devices, vol. 1, no. 1, pp. 108-115, 2021, doi: 10.51316/jst.150.ssad.2021.31.1.14
T. D. Nguyen, H. P. Pham, and Q. D. Nguyen, “Design and fabrication of a 2.5 mm-diameter micro rotational motor based on MEMS technology,” Journal of Science & Technology Technical Universities, vol. 108, pp. 26-32, 2015.
P. Bauwens, S. Cornelis, and J. Doutreloigne, “A leakage compensated charge control driving circuit with sensor feedback for a comb drive actuator,” Sensors and Actuators A: Physical, vol. 329, 2021, Art. no. 112799, doi: 10.1016/j.sna.2021.112799.
T. D. Nguyen, H. P. Pham, Q. D. Nguyen, and D. P. Nguyen, “Iterative Learning Control for V-Shaped Electrothermal Microactuator,” Electronics, vol. 8, no. 12, 2019, Art. no. 1410, doi: 10.3390/electronics8121410.
P. H. Pham, D. T. Nguyen, and K. T. Hoang, “Single mask and low voltage electrothermal micromotor,” Sensors and Actuators A: Physical, vol. 374, 2024, Art. no. 115481, doi: 10.1016/j.sna.2024.115481.
K. T. Hoang, D. T. Nguyen, P. H. Pham, “Impact of design parameters on working stability of the electrothermal V-shaped actuator,” Microsystem Technologies, vol. 26, pp. 1479-1487, 2020, doi: 10.1007/s00542-019-04682-y
T. D. Nguyen, T. K. Hoang, and H. P. Pham, “Heat Transfer Model and Critical Driving Frequency of Electrothermal V-Shaped Actuators,” in Proceedings of the International Conference on Engineering Research and Applications (ICERA-2019), Springer, Cham, 2019, pp. 394-405, doi: 10.1007/978-3-030-37497-6_46.
K. T. Hoang and P. H. Pham, “Safe working condition and optimal dimension of the electrothermal V-shaped actuator,” Microsystem Technologies, vol. 28, pp. 1673–1685, 2022, doi: 10.1007/s00542-022-05309-5.