INDENTATION SIZE EFFECT ON THE DEFORMATION BEHAVIOR OF Ta-Cu AMORPHOUS THIN FILMS

Abstract

Molecular dynamics simulations were conducted to investigate the deformation characteristics of Ta 40Cu60 amorphous coatings under nanoindentation. This study provides insights into the influence of indenter size on the deformation mechanisms at the Ta40Cu60 amorphous coating/Cu substrate interface. The results reveal that both the maximum indentation force and the extent of the plastic deformation region increase with increasing indenter diameter.