HETEROEPITAXIAL GROWTH OF WO3 FILMS ON ITO(400) SURFACES AND THE EFFECT OF THICKNESS OF ITO LAYER, COATED ON GLASS SUBSTRATES ON GROWTH ORIENTATION OF WO3 LATTICE

  • Lê Văn Ngọc
  • Trần Cao Vinh
  • Trần Tuấn
  • Huỳnh Thành Đạt
  • Dương Ái Phương
  • Lê Quang Toại
  • Bạch Văn Hòa

Abstract

WO3 films were deposited by rf magnetron sputtering method onto ITO(400)-coated glass substrates. Experiments showed that the growth orientation of WO3 crystalline lattice depends on the thickness of ITO layer. In this paper, this dependence  will be discussed further.

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Published
2010-04-14
Issue
Vol. 12 No. 12 (2009)
Section
ARTILES
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