Determine the shape factor in heat transfer model of micro electrothermal V-shaped actuator using ANSYS Workbench software

Abstract

This article proposes a method to determine the shape factor in heat transfer model of micro electrothermal V-shaped actuator using ANSYS Workbench software. The 2D model was built to investigate the heat transfer from a beam cross-section to the substrate through a thin layer of air. This model can be used to determine the influence of beam width and thickness on the shape factor. The results of this work will provide an effective method to determine the shape factor in theoretical heat transfer models for micro electrothermal V-shaped actuator and can also be applied to similar heat transfer models.