Research on fabrication process and investigation of vibration sensor of single cantilever structure

Abstract

Vibration sensor has been designed and fabricated successfully based on bulk MEMS technology. Sensor consists of a mass suspend on a single silicon cantilever. Samples of sensor (their cantilever has the same in their width of 0.8mm and has a difference in thickness from 0.025 - 0.045 mm and a difference in their length from 1 - 1.8 mm) have been fabricated. Single cantilever structure of sensor was made by wet etching in KOH solution. Piezoresistor which has structure  of  4  electrodes  was  made  by  thermal  diffusion  method  from SOD source of Boron dopand. The sensor have been investigated in vibration system. The obtained results show that, the sensor has good response to vibration signal.