DEPOSITION AND STUDY OF ALCOHOL VAPOR SENSITIVITY OF SnO2/ZnSnO3 THIN FILMS

  • Pham Van Vinh , Vu Kim Thai
Keywords: SnO2/ZnSnO3 thin films, alcohol sensor, surface porosity, surface treatment

Abstract

The thin films of SnO2/ZnSnO3 were deposited on glass wafer substrate by a compression sprayer deposition system using Zn(CH3COO)2.2H2O and SnCl4.5H2O as precursors. The surface of the films were treated in HCl acid solution 2% to improve
their surface porosity. The influence of the surface treatment time, working temperature and alcohol vapor concentration on the sensitivity properties of the films were investigated. SEM images showed that the films treated for 60 min exhibited the best surface porosity. The phase analysis showed the presence of SnO2 and ZnSnO3 crystal phase on the films. The surface porosity, working temperature and alcohol concentration influenced strongly on the sensitivity properties of the films. The films with high surface porosity showed high sensitivity. The best sensitivity of the films was found on the films treated in HCl solution for 60min.

điểm /   đánh giá
Published
2021-09-02
Issue
No. 46 (2021)
Section
ARTICLE