Nonlinear vibration of Micro beams under electrostatic force

Abstract

in this work, we study nonlinear oscillations of Micro beams based on the nonlocal theory (NGT) incorporated the thickness effect and the Euler–Bernoulli beam theory (EBT) with the Von Karman’s assumption.Consider a clamped–clamped micro beam placed between two stationary electrodes. We will apply the variational approach to find the approximate solution of the nonlinear compare with results in studies to evaluate the accuracy of the method. Effects of material,of a voltage and operational parameters on the frequency ratio (the ratio of nonlinear frequency to linear frequency), on the nonlinear frequency, and on the stable configuration of the micro beam are studied and discussed.