EFFECTS OF TEMPERATURE ON STRUCTURAL AND OPTICAL PROPERTIES OF ZnO THIN FILMS DEPOSITED BY CVD METHOD FROM ZINC ACETYLACETONATE PRECUSOR

Abstract

    Zinc oxide thin films were prepared on glass substrate by CVD method from zinc acetylacetonate precursor. The effect of temperature on the structural and optical properties of the ZnO films was investigated by x-ray diffraction (XRD), SEM, UV-Vis and photoluminescence spectra methods. The structural analyses of the films indicate they are polycrystalline and have a wurtzite (hexagonal) structure. The ZnO films deposited at higher temperatures shows a stronger orientation of the crystallites with (0002) plane parallel to the substrate surface, as compared with the ZnO films deposited at lower temperatures. The measured direct band gap energy of ZnO films deposited at 250, 300 and 500oC were 3,29, 3,28 and 3,28 eV, respectively.